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Electromigration
Aims
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Aims
Before you start
Introduction
The theory of electromigration
Electromigration damage
Flux divergence (I)
Flux divergence (II)
Avoiding electromigration problems
Alternatives to aluminium metallization
Summary
Questions
Going further
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Aims
On completion of this tutorial package, you should:
understand the process of electromigration
be aware of how damage is caused by electromigration and the ways in which such damage is minimized
know the reasons for changing from Al-based to Cu-based metallization.
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© 2004-2013 University of Cambridge.
Except where otherwise noted, content is licensed under a
Creative Commons Attribution-NonCommercial-ShareAlike 2.0 UK:
England & Wales License.