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Grain growth
The grain structure observed is influenced by both the original production and subsequent grain growth. Grain growth is most significant at temperatures more than half the melting temperature i.e. T>½Tm.
During grain growth, some grains grow larger whilst others shrink and become smaller, eventually disappearing. Overall , the average grain size increases with time.
The grain structure observed is influenced by both the original production and subsequent grain growth. Grain growth is most significant at temperatures more than half the melting temperature i.e. T>½Tm.
During grain growth, some grains grow larger whilst others shrink and become smaller, eventually disappearing. Overall , the average grain size increases with time.
Note: Animation of grain growth is only a schematic replication
of the actual process. Several factors are involved to determine which
grains grow and which shrink.
Grain growth
within metallization lines
Metallization lines are very narrow (approximately 0.2µm or less), and are becoming ever narrower. This results in the formation of a bamboo-like microstructure, which is desirable for its electromigration resistance.
Metallization lines are very narrow (approximately 0.2µm or less), and are becoming ever narrower. This results in the formation of a bamboo-like microstructure, which is desirable for its electromigration resistance.
Bamboo Structure
Atoms along the grain boundary is most mobile. Due to the
electromigration force acting parallel to the grain boundary, no motion
can take place. This reduces the amount of electromigration flux, thus
protecting the line from electromigration-induced damage.