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Real Space Unit Cells
Film
substrate
Film strained to match substrate
Reciprocal Space Points
In plane lattice
parameters matched
Real Example of (105) Reciprocal
Space Maps AlGaN cell < GaN cell
< InGaN cell
AlxGa(1-x)N
film on GaN InxGa(1-x)N
film on GaN
x-coordinates unmatched.
x-coordinates matched showing that the film is strained
to the substrate
The same data in real space
on diffractometer axes.
With the data plotted in real space the crystallographic
result is not readily apparent.
(105) RSMs
c out-of-plane and a & b within the plane. GaN is hexagonal
1/S001= c, 1/S100=d100, a= d100 /cos30. The intensities of the contours
are plotted on a log scale so the substrate peak is stronger than the
film peak. AlxGa(1-x)N
film on GaN InxGa(1-x)N
film on GaN
GaN out of plane has a spacing of ~0.962Å-1
for 5 cells so c ~ 5/0.962 = 5.2Å.
In-plane the spacing is 0.367Å-1. a ~ 1/0.367 ×
cos 30 = 3.19Å.