Summary

After working through this TLP you should understand:

• the importance of growing thin films which are flat at the atomic scale;
• the reasons why three different types of growth can occur during epitaxial deposition;
• the factors which determine the growth mode and hence the flatness of the resultant film;
• the importance of strain in the growth of heteroepitaxial films.

If you read some of the recommended further material (below) you will also appreciate the range of applications for epitaxial films and the existence of alternative growth techniques.