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Electromigration

Electromigration is an ever-increasing problem as integrated circuits are pushed towards further miniaturization. The theory of the phenomenon is explained, including electromigration-induced failure and how it has been and can be minimized.

Integrated circuits viewed under the scanning electron microscope

Aims
Before you start
Introduction
The theory of electromigration
Electromigration damage
Flux divergence (I)
Flux divergence (II)
Avoiding electromigration problems
Alternatives to aluminium metallization
Summary
Questions
Going further

Begin

First created: June 2006.